Building world-class microlithographic lens systems: optical material requirements and qualification methods

Paul R. DeStefano; Paul F. Michaloski

doi:10.1117/12.165236

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6 December 1993 Building world-class microlithographic lens systems: optical material requirements and qualification methods

Paul R. DeStefano, Paul F. Michaloski

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Proceedings Volume 2018, Passive Materials for Optical Elements II; (1993) https://doi.org/10.1117/12.165236
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Building successive generations of state-of-the-art wide field, sub-micron microlithographic lens systems dictates ever-tightening material tolerances that challenge glass manufacturers. This paper discusses the optical material needs for microlithographic lens systems and Tropel's in-house material qualification program. Material qualification is divided into three successive stages: (1) fluorescence testing to qualitatively analyze color center characteristics of the material; (2) homogeneity testing to determine the relative volumetric variations in index; and (3) absolute index testing at multiple wavelengths to determine the material's dispersion characteristics.

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Paul R. DeStefano and Paul F. Michaloski "Building world-class microlithographic lens systems: optical material requirements and qualification methods", Proc. SPIE 2018, Passive Materials for Optical Elements II, (6 December 1993); https://doi.org/10.1117/12.165236

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