Paper
1 November 1993 Uncooled thermal imaging at Texas Instruments
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Abstract
Texas Instruments is active in productizing uncooled thermal imaging systems for commercial and military products. The technology is based on the field-enhanced pyroelectric effect in ferroelectric barium-strontium titanate. The detector is mated to a readout IC (ROIC) via bump-bonding, and the single output from the ROIC is processed serially to provide both 8-bit digital and NTSC video outputs. Overall system cost is minimized and the electronics are simplified by using a scene-averaging chopper and operating the detector in its inherently ac- coupled mode. The past two years have been devoted to improving producibility, primarily of the uncooled focal plane array (UFPA) and its package. The result is a detector process that is 95% compatible with standard silicon processing. Although explicit performance improvement has been a secondary priority, the producibility improvements have led to a factor of two improvement in sensitivity. Recently demonstrated NETD is 0.047 degree(s)C with f/1 optics.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles M. Hanson "Uncooled thermal imaging at Texas Instruments", Proc. SPIE 2020, Infrared Technology XIX, (1 November 1993); https://doi.org/10.1117/12.160554
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Cited by 28 scholarly publications and 13 patents.
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KEYWORDS
Sensors

Infrared technology

Infrared sensors

Thermography

Electronics

Linear filtering

Silicon

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