Translator Disclaimer
Paper
1 February 1994 Novel process for the fabrication of top-drive double stator micromotor on glass
Author Affiliations +
Abstract
A top-drive variable capacitance (VC) electrostatic rotational micromotor with double stator was fabricated combining bulk silicon machining with etch stop on junction to anodic bonding of silicon to glass. The novel process overcomes the drawbacks found in the fabrication of top- drive devices by use of usual surface micromachining of polysilicon LPCVD layers.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hocine Ziad, Serge Spirkovitch, Jeannine Marty, Francois Baillieu, Serge Rigo, and Neil Milne "Novel process for the fabrication of top-drive double stator micromotor on glass", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167563
PROCEEDINGS
7 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Thin film front protection of CMOS wafers against KOH
Proceedings of SPIE (September 08 1998)
Integration of MEMS devices
Proceedings of SPIE (September 29 1999)
Role of RIE in microchip bond pad corrosion
Proceedings of SPIE (September 12 1996)
Bonding and deep RIE a powerful combination for high...
Proceedings of SPIE (January 22 2005)
Micromachined accelerometer based on electron tunneling
Proceedings of SPIE (September 29 1999)
Dry release process of anhydrous HF gas phase etching for...
Proceedings of SPIE (October 01 1999)

Back to Top