Surface patterning by an improved laser-induced forward transfer technique

Tamas Szoerenyi; Zsolt Toth; Zoltan Kantor

doi:10.1117/12.167550

1 February 1994 Surface patterning by an improved laser-induced forward transfer technique

Tamas Szoerenyi, Zsolt Toth, Zoltan Kantor

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167550
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

A simple and inexpensive single-step technique for surface patterning in the micrometers regime is presented. As a result of a systematic study on laser-induced ablation and transfer of tungsten thin films it is shown that deposition of well adhering micrometer sized patterns of 100% coverage preserving the shape and dimensions of the laser processed area can be attained by single pulses of peak power up to 100 mW and 100 microsecond(s) - 1 ms duration from a diode laser pumped YAG laser.

Citation Download Citation

Tamas Szoerenyi, Zsolt Toth, and Zoltan Kantor "Surface patterning by an improved laser-induced forward transfer technique", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167550

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