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2 November 1993 Program package for the ellipsometry of inhomogeneous layers
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Abstract
In this work we describe ellipsometric software that has been developed at Moscow State University. This software is based on the assurance that hierarchy of models should be used for the thin film. The hierarchy of layer models and the concept of the model being in the agreement with the accuracy of experimental data are discussed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander V. Tikhonravov and Michael K. Trubetskov "Program package for the ellipsometry of inhomogeneous layers", Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); https://doi.org/10.1117/12.163546
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