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2 November 1993Program package for the ellipsometry of inhomogeneous layers
In this work we describe ellipsometric software that has been developed at Moscow State University. This software is based on the assurance that hierarchy of models should be used for the thin film. The hierarchy of layer models and the concept of the model being in the agreement with the accuracy of experimental data are discussed.
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Alexander V. Tikhonravov, Michael K. Trubetskov, "Program package for the ellipsometry of inhomogeneous layers," Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); https://doi.org/10.1117/12.163546