Miniature integrated optical sensors

Rino E. Kunz; Lothar U. Kempen

doi:10.1117/12.170652

10 March 1994 Miniature integrated optical sensors

Rino E. Kunz, Lothar U. Kempen

Proceedings Volume 2068, Chemical, Biochemical, and Environmental Fiber Sensors V; (1994) https://doi.org/10.1117/12.170652
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

Integrated optical transducers with on-chip measuring variables are shown to be suitable for realizing complete miniature sensor modules. Theoretical expressions are derived and discussed that can readily be used for the design of sensors based on converting the value of a measurand into the position of an on-chip integrated optical light pointer. The emphasis is on configurations based on tapered waveguides and chirped grating couplers. The viability of this approach is demonstrated by reporting first experimental results for a novel miniature refractometer chip.

Citation Download Citation

Rino E. Kunz and Lothar U. Kempen "Miniature integrated optical sensors", Proc. SPIE 2068, Chemical, Biochemical, and Environmental Fiber Sensors V, (10 March 1994); https://doi.org/10.1117/12.170652

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