Silicon-on-insulator optical rib waveguide circuits for fiber optic sensors

Andrew G. Rickman; Graham T. Reed; Fereydoon Namavar

doi:10.1117/12.165921

30 December 1993 Silicon-on-insulator optical rib waveguide circuits for fiber optic sensors

Andrew G. Rickman, Graham T. Reed, Fereydoon Namavar

Proceedings Volume 2071, Distributed and Multiplexed Fiber Optic Sensors III; (1993) https://doi.org/10.1117/12.165921
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

Optical rib waveguides have been formed in silicon-on-insulator structures. The effects of rib waveguide dimensions on mode and loss characteristics have been studied. Waveguides with dimensions compatible with single mode optical fibers have exhibited single mode behavior with low loss. The compatibility of these silicon-on-insulator waveguide structures with optical fibers, combined with the ability to form active optical modulators in silicon based on free carrier injection/depletion is encouraging for the future use of silicon guided optics in fiber optical and integrated optical sensors. The use of SOI active waveguide circuits for closed loop AC dither fringe detection in interferometric sensors is a possible application area.

Citation Download Citation

Andrew G. Rickman, Graham T. Reed, and Fereydoon Namavar "Silicon-on-insulator optical rib waveguide circuits for fiber optic sensors", Proc. SPIE 2071, Distributed and Multiplexed Fiber Optic Sensors III, (30 December 1993); https://doi.org/10.1117/12.165921

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