Characterization of defect sizing on an automatic inspection system (KLA238e)

Dave Stocker; Brian Martin; Jeffrey O. Browne

doi:10.1117/12.167271

15 February 1994 Characterization of defect sizing on an automatic inspection system (KLA238e)

Dave Stocker, Brian Martin, Jeffrey O. Browne

Author Affiliations +

Proceedings Volume 2087, 13th Annual BACUS Symposium on Photomask Technology and Management; (1994) https://doi.org/10.1117/12.167271
Event: 13th Annual BACUS Symposium on Photomask Technology and Management, 1993, Santa Clara, CA, United States

Abstract

This paper describes the calibration of an automatic inspection system to size 5X reticle defects down to half-micron resolution, the defect printability limit of the stepper lens with which the 5X reticles are to be used. An enhanced technique using image analysis for defect sizing is also described. Whilst enabling more accurate defect sizing, this method is resolution limited in automatic operation.

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Dave Stocker, Brian Martin, and Jeffrey O. Browne "Characterization of defect sizing on an automatic inspection system (KLA238e)", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); https://doi.org/10.1117/12.167271

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