Direct phase measurement in phase-shift masks with a differential heterodyne interferometer

Hiroshi Fujita; Hiroyuki Miyashita; Hiroyuki Nakamura; Hisatake Sano; Kasuhiko Kimura; Hiroshi Nakanishi; Hideo Takizawa; Hidehiko Yamaguchi; Takahiro Ode

doi:10.1117/12.167255

15 February 1994 Direct phase measurement in phase-shift masks with a differential heterodyne interferometer

Hiroshi Fujita, Hiroyuki Miyashita, Hiroyuki Nakamura, Hisatake Sano, Kasuhiko Kimura, Hiroshi Nakanishi, Hideo Takizawa, Hidehiko Yamaguchi, Takahiro Ode

Author Affiliations +

Proceedings Volume 2087, 13th Annual BACUS Symposium on Photomask Technology and Management; (1994) https://doi.org/10.1117/12.167255
Event: 13th Annual BACUS Symposium on Photomask Technology and Management, 1993, Santa Clara, CA, United States

Abstract

Lasertec has developed a novel phase-shift measurement system 1PM11, which uses a differential heterodyne interferometer. In 1PM11, phase information is converted into a low- frequency heterodyne beat that is easily measurable by an electric current. Two-frequency laser beams which are oscillated from a He-Ne laser (632.8 nm) tube are used. When a 40X objective lens being used, the beam is 2.3 micrometers in diameter and the distance of the two beams is adjustable from 3.0 to 6.0 micrometers . The performance of 1PM11 for three types of phase-shift masks: (1) the shifter of etched quartz, (2) spin-on-glass shifter on etch- stop/quartz, and (3) the attenuating shifter, is reported.

Citation Download Citation

Hiroshi Fujita, Hiroyuki Miyashita, Hiroyuki Nakamura, Hisatake Sano, Kasuhiko Kimura, Hiroshi Nakanishi, Hideo Takizawa, Hidehiko Yamaguchi, and Takahiro Ode "Direct phase measurement in phase-shift masks with a differential heterodyne interferometer", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); https://doi.org/10.1117/12.167255

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