Paper
15 February 1994 LAN integration of photomask tools at IBM Burlington using the IBMRISC/6000
Edward J. Wilbur
Author Affiliations +
Abstract
IBM Burlington has made the transition from a purely IBM MVS Host based architecture for writing and inspecting photomasks to an innovative hybrid host and local area network (LAN) solution. This involved going from a pure 9 track host generated tape environment to a IBM RISC/6000 LAN solution. An 80% tape reduction has been realized to date. Other IBM sites utilizing the same architecture include IBM Essonnes, France; IBM San Jose, CA and IBM Rochester, MN. The transition of the IBM Burlington photomask operational environment will be detailed to show the migration from tape to LAN for current and new equipment. Decision points and rationale that were used in the process will be given.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edward J. Wilbur "LAN integration of photomask tools at IBM Burlington using the IBMRISC/6000", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); https://doi.org/10.1117/12.167273
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Local area networks

Photomasks

Data conversion

Inspection

Manufacturing

Photomask technology

Computed tomography

RELATED CONTENT

Universal pattern data format
Proceedings of SPIE (February 15 1994)
Mask Industry Assessment: 2011
Proceedings of SPIE (October 13 2011)
Mask rule check using priority information of mask patterns
Proceedings of SPIE (November 01 2007)

Back to Top