Results from the first fully automated PBS-mask process and pelliclization

Andreas B. Oelmann; Gerd M. Unger

doi:10.1117/12.167249

15 February 1994 Results from the first fully automated PBS-mask process and pelliclization

Andreas B. Oelmann, Gerd M. Unger

Author Affiliations +

Proceedings Volume 2087, 13th Annual BACUS Symposium on Photomask Technology and Management; (1994) https://doi.org/10.1117/12.167249
Event: 13th Annual BACUS Symposium on Photomask Technology and Management, 1993, Santa Clara, CA, United States

Abstract

Automation is widely discussed in IC- and mask-manufacturing and partially realized everywhere. The idea for the automation goes back to 1978, when it turned out that the operators for the then newly installed PBS-process-line (the first in Europe) should be trained to behave like robots for particle reduction gaining lower defect densities on the masks. More than this goal has been achieved. It turned out recently, that the automation with its dedicated work routes and detailed documentation of every lot (individual mask or reticle) made it easy to obtain the CEEC certificate which includes ISO 9001.

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Andreas B. Oelmann and Gerd M. Unger "Results from the first fully automated PBS-mask process and pelliclization", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); https://doi.org/10.1117/12.167249

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