Direct kinetic measurement of photochemical reaction of diazide-type photoresist by use of rapid-scan FTIR

K. Shoda; G. Katagiri; Hideyuki Ishida; Isao Noda

doi:10.1117/12.166799

31 January 1994 Direct kinetic measurement of photochemical reaction of diazide-type photoresist by use of rapid-scan FTIR

K. Shoda, G. Katagiri, Hideyuki Ishida, Isao Noda

Author Affiliations +

Proceedings Volume 2089, 9th International Conference on Fourier Transform Spectroscopy; (1994) https://doi.org/10.1117/12.166799
Event: Fourier Transform Spectroscopy: Ninth International Conference, 1993, Calgary, Canada

Abstract

Kinetic behavior of a fast photochemical reaction of quinone diazide-type photoresist has been followed directly by a rapid-scan FT-IR. An intermediate species, ketene, rapid depletion of diazide and formation of carboxylic acid have been captured unambiguously. It has been demonstrated that a newly developed 2-D correlation formalism is very useful in the study of the reaction mechanism and kinetics of the photoresist including matrix polymer.

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K. Shoda, G. Katagiri, Hideyuki Ishida, and Isao Noda "Direct kinetic measurement of photochemical reaction of diazide-type photoresist by use of rapid-scan FTIR", Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); https://doi.org/10.1117/12.166799

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