Laser interferometric device for measuring step gauges with high accuracy

Yan-Fen Zang; Guoxiong Zhang; Xiang-Yang Liu

doi:10.1117/12.156281

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22 September 1993 Laser interferometric device for measuring step gauges with high accuracy

Yan-Fen Zang, Guoxiong Zhang, Xiang-Yang Liu

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Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156281
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

A device used for measuring step gauges with high accuracy is introduced in this paper. This device can divide the laser beam from interferometer into two beams parallel to the measured line The two beams are reflected by a right angle prism and a plane mirror respectively which are fixed on the measuring head. The Abbe error caused by the error of angular motion of measuring head is eliminated when the distance of the two beams equals the distance between the measured line and the laser beam near the line. The measuring head with the right angle prism and plane mirror can move to and from the step gauges without breaking the beams. With different types of probes this device can measure 1D (one dimensional) ball array 2D (two dimensional) ball arrayand other datum artifacts with step distance et al. .

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Yan-Fen Zang, Guoxiong Zhang, and Xiang-Yang Liu "Laser interferometric device for measuring step gauges with high accuracy", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156281

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