Optical/digital system for measurements and diagnostics of surface properties of materials for micro- and optoelectronics

Roman S. Bachevsky; Volodymyr A. Dostojny; Leonid I. Muravsky; Arkadiy I. Stefansky; Yurij V. Naidich; Mykola F. Grygorenko

doi:10.1117/12.191994

31 October 1994 Optical/digital system for measurements and diagnostics of surface properties of materials for micro- and optoelectronics

Roman S. Bachevsky, Volodymyr A. Dostojny, Leonid I. Muravsky, Arkadiy I. Stefansky, Yurij V. Naidich, Mykola F. Grygorenko

Author Affiliations +

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.191994
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

The optical/digital system with solid state array detectors for capillary characteristics of materials and high-temperature melts measuring and diagnostics by sessile-drop method is described. Conditions of sessile drop image forming in the optical scheme of the system are defined. The spatial gradient algorithm for image spatial gradient field forming and gradient maximums localization is proposed. Three methods of sessile drop geometric parameters precise measuring and gradient maximums locations estimation are described. The results of distilled water and mercury sessile drop geometric parameters multiple measurements with the subsequent averaging of obtained data are presented. The perspectives of measurement accuracy increasing and sessile drop image processing time decreasing are discussed.

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Roman S. Bachevsky, Volodymyr A. Dostojny, Leonid I. Muravsky, Arkadiy I. Stefansky, Yurij V. Naidich, and Mykola F. Grygorenko "Optical/digital system for measurements and diagnostics of surface properties of materials for micro- and optoelectronics", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.191994

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