Spectral diagnostics of microelectronic material surface structure with high spatial resolution

I. P. Bobrovskaya; A. G. Chepilko; L. V. Levash; G. A. Puchkovskaya; M. Yu Vedula

doi:10.1117/12.191999

31 October 1994 Spectral diagnostics of microelectronic material surface structure with high spatial resolution

I. P. Bobrovskaya, A. G. Chepilko, L. V. Levash, G. A. Puchkovskaya, M. Yu Vedula

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.191999
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

A device for spectral diagnostics of surface quality of real structures (crystals, ceramics, films) being used in modern microelectronics has been proposed. It consists of several selective IR leading semiconductor sources, an optical system, is executed on the basis of IR fibers, an unselective pyroelectric IR detector and a block of signal processing.

Citation Download Citation

I. P. Bobrovskaya, A. G. Chepilko, L. V. Levash, G. A. Puchkovskaya, and M. Yu Vedula "Spectral diagnostics of microelectronic material surface structure with high spatial resolution", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.191999

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