High-damage threshold antireflectors by physical-vapor-deposited amorphous fluoropolymer

Robert Chow; Maura K. Spragge; Gary E. Loomis; Ian M. Thomas; Frank Rainer; Richard L. Ward; Mark R. Kozlowski

doi:10.1117/12.180886

28 July 1994 High-damage threshold antireflectors by physical-vapor-deposited amorphous fluoropolymer

Robert Chow, Maura K. Spragge, Gary E. Loomis, Ian M. Thomas, Frank Rainer, Richard L. Ward, Mark R. Kozlowski

Author Affiliations +

Proceedings Volume 2114, Laser-Induced Damage in Optical Materials: 1993; (1994) https://doi.org/10.1117/12.180886
Event: Laser-Induced Damage in Optical Materials: 1993, 1993, Boulder, CO, United States

Abstract

High laser-resistant anti-reflective coatings were made from an amorphous fluoropolymer (Teflon AF2400) material by physical vapor deposition. Single layers of Teflon AF2400 were thermally deposited in a vacuum chamber. The refractive index and adhesion of the coatings were determined as a function of deposition rate (2 to 20 angstroms/s), substrate temperature (20 to 200 degree(s)C), and glow-discharge bias potential (-1500 to 1500 V).

Citation Download Citation

Robert Chow, Maura K. Spragge, Gary E. Loomis, Ian M. Thomas, Frank Rainer, Richard L. Ward, and Mark R. Kozlowski "High-damage threshold antireflectors by physical-vapor-deposited amorphous fluoropolymer", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); https://doi.org/10.1117/12.180886

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