Morphology investigations by atomic force microscopy of thin films and substrates for excimer laser mirrors

Angela Duparre; Norbert Kaiser; Stefan Jakobs

doi:10.1117/12.180920

28 July 1994 Morphology investigations by atomic force microscopy of thin films and substrates for excimer laser mirrors

Angela Duparre, Norbert Kaiser, Stefan Jakobs

Author Affiliations +

Proceedings Volume 2114, Laser-Induced Damage in Optical Materials: 1993; (1994) https://doi.org/10.1117/12.180920
Event: Laser-Induced Damage in Optical Materials: 1993, 1993, Boulder, CO, United States

Abstract

The surface microstructure of evaporated single layer and multilayer fluoride coatings for KrF lasers as well as the topography of uncoated fused silica substrates have been investigated with an atomic force microscope (AFM). The fluoride films exhibit a pronounced columnar microstructure that accounts for the typical surface morphology and causes surface roughness the magnitude of which depends on film thickness and substrate temperature. Well polished fused silica substrates show low surface roughness, which has been determined from both AFM and light scattering measurements.

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Angela Duparre, Norbert Kaiser, and Stefan Jakobs "Morphology investigations by atomic force microscopy of thin films and substrates for excimer laser mirrors", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); https://doi.org/10.1117/12.180920

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