Optical characterization of dielectric films and modified surfaces

Gregory J. Exarhos

doi:10.1117/12.180877

28 July 1994 Optical characterization of dielectric films and modified surfaces

Gregory J. Exarhos

Author Affiliations +

Proceedings Volume 2114, Laser-Induced Damage in Optical Materials: 1993; (1994) https://doi.org/10.1117/12.180877
Event: Laser-Induced Damage in Optical Materials: 1993, 1993, Boulder, CO, United States

Abstract

The response of an optical material to an applied stress (thermal, mechanical, chemical, electromagnetic) is influenced by certain key materials properties which include the resident microstructure, chemical and phase purity, and the magnitude of both interfacial and residual stress. Effective non-destructive methods for evaluating such materials with respect to these parameters involve the use of optical probes. Properties variations as a function of processing conditions, and during and following interaction with a high energy laser pulse can be evaluated. Results of such studies provide insight into the laser damage mechanism and suggest processing changes which might improve materials stability. A brief review of several pertinent optical characterization methods is presented and various examples are discussed which demonstrate the utility of these methods for the characterization of optical materials.

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Gregory J. Exarhos "Optical characterization of dielectric films and modified surfaces", Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); https://doi.org/10.1117/12.180877

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