Paper
11 May 1994 Room-temperature photoreflectance characterization of process-induced strains in GaAs/Ga0.7Al0.3As quantum dots
Hao Qiang, Fred H. Pollak, Yin-Sheng Tang, Peidong D. Wang, Cliva M. Sotomayor-Torres
Author Affiliations +
Proceedings Volume 2139, Quantum Well and Superlattice Physics V; (1994) https://doi.org/10.1117/12.175719
Event: OE/LASE '94, 1994, Los Angeles, CA, United States
Abstract
Using contactless photoreflectance at 300 K we have studied several GaAs/Ga0.7Al0.3As quantum dot arrays fabricated by reactive-ion etching using SiCl4. The spectrum from a control sample that had no dots also was recorded. From the observed shifts of the fundamental conduction to heavy- and light-hole quantum transitions we have evaluated the magnitude and nature of the process-induced strain in the dots.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hao Qiang, Fred H. Pollak, Yin-Sheng Tang, Peidong D. Wang, and Cliva M. Sotomayor-Torres "Room-temperature photoreflectance characterization of process-induced strains in GaAs/Ga0.7Al0.3As quantum dots", Proc. SPIE 2139, Quantum Well and Superlattice Physics V, (11 May 1994); https://doi.org/10.1117/12.175719
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Quantum dots

Gallium arsenide

Reactive ion etching

Semiconductors

Spectroscopy

Nanostructures

Modulation

Back to Top