Paper
2 May 1994 Antiresonant reflecting optical waveguides based on solution-deposited multilayer structures
Brian Smith, D. Fraser Clark
Author Affiliations +
Abstract
A simple fabrication process for multilayer antiresonant reflecting optical waveguides based entirely on the sol-gel process is presented. Solutions of methyltrimethoxysilane are used to fabricate layers with thicknesses in the range 1 - 20 micrometers , necessary for the core and second cladding. An experimental model has been developed to describe both the process time and the final film thickness with respect to the process parameters. Titanium(iv)propoxide is used to derive the high index layer of the device, all films being deposited via the spin casting technique. Simulation has shown that both the fabrication tolerances and the transmission loss can be controlled via the refractive index of this first cladding layer. Dyes have been successfully incorporated into the porous core material and we have identified possible applications in optical chemical sensing.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Brian Smith and D. Fraser Clark "Antiresonant reflecting optical waveguides based on solution-deposited multilayer structures", Proc. SPIE 2150, Design, Simulation, and Fabrication of Optoelectronic Devices and Circuits, (2 May 1994); https://doi.org/10.1117/12.175001
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KEYWORDS
Cladding

Refractive index

Water

Silicon

Waveguides

Multilayers

Tolerancing

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