Development of integrating radiation imagers with diamond MIS devices

Mike Marchywka; Steven C. Binari; Pehr E. Pehrsson; J. Daniel Moses

doi:10.1117/12.171756

1 April 1994 Development of integrating radiation imagers with diamond MIS devices

Mike Marchywka, Steven C. Binari, Pehr E. Pehrsson, J. Daniel Moses

Proceedings Volume 2151, Diamond-Film Semiconductors; (1994) https://doi.org/10.1117/12.171756
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Diamond has long been recognized as a promising material to fabricate robust, solar-blind radiation detectors. In this work, we present initial results from our program to fabricate a 2D imager using synthetic diamond. We observed the desired low dark current and spectral response properties in MSM detectors made on type-IIa diamond and integrating photoresponse was observed in MIS capacitors fabricated on type IIb diamond. Subsequent modeling of the MIS photoresponse supports the conclusion that electrons are stored at the diamond-insulator interface which makes it feasible to consider a diamond CCD. We discuss relevant processing steps and a plan to make a thin, back-illuminated CCD for VUV and UV imaging applications.

Citation Download Citation

Mike Marchywka, Steven C. Binari, Pehr E. Pehrsson, and J. Daniel Moses "Development of integrating radiation imagers with diamond MIS devices", Proc. SPIE 2151, Diamond-Film Semiconductors, (1 April 1994); https://doi.org/10.1117/12.171756

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