Supersonic flow sensor using semiconductor diamond films

Sacharia Albin; Bhaskar Bulusu; Ravindra P. Joshi; Scott Kruegel

doi:10.1117/12.171760

1 April 1994 Supersonic flow sensor using semiconductor diamond films

Sacharia Albin, Bhaskar Bulusu, Ravindra P. Joshi, Scott Kruegel

Proceedings Volume 2151, Diamond-Film Semiconductors; (1994) https://doi.org/10.1117/12.171760
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

The frequency response of thin film sensors can be enhanced by using a film of semiconducting diamond. Conventional sensors made of metallic films such as Ni can only be used for measuring flow turbulences of the order of 60 KHz. The proposed diamond sensor can measure instabilities as high as 2 X 10⁵ Hz. A computer simulation was carried out to compare the response of the proposed sensor with a Ni film sensor. The rationale for choosing the appropriate film and substrate materials has also been explained.

Citation Download Citation

Sacharia Albin, Bhaskar Bulusu, Ravindra P. Joshi, and Scott Kruegel "Supersonic flow sensor using semiconductor diamond films", Proc. SPIE 2151, Diamond-Film Semiconductors, (1 April 1994); https://doi.org/10.1117/12.171760

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