Fabricating spherical microlens arrays with a two-step laser beam writing technique

Georges Przyrembel

doi:10.1117/12.178087

17 June 1994 Fabricating spherical microlens arrays with a two-step laser beam writing technique

Georges Przyrembel

Proceedings Volume 2152, Diffractive and Holographic Optics Technology; (1994) https://doi.org/10.1117/12.178087
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

The fabrication process of refractive microlens arrays with a continuous surface relief is described. The elements are fabricated with a laser beam lithographic system and are directly written into photoresist. By this method the manufacturing of lenses with a broad range of numerical apertures N.A. is possible. Lenses with different diameters in the range from 25 to 100micrometers were written in photoresist. Furthermore, a modified technique with two subsequent exposures is applied which simplifies the procedure for generating the data and writing the lens topography. First attempts to transfer the structures into the substrate by ion etching show positive results. A first suggested fabrication method of the spherical microlenses by an exposure technique using a z-stepped probe chuck is also discussed.

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Georges Przyrembel "Fabricating spherical microlens arrays with a two-step laser beam writing technique", Proc. SPIE 2152, Diffractive and Holographic Optics Technology, (17 June 1994); https://doi.org/10.1117/12.178087

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KEYWORDS

Lenses

Microlens array

Fabrication

Photoresist materials

Spherical lenses

Etching

Microlens

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