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17 June 1994 Fabricating spherical microlens arrays with a two-step laser beam writing technique
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Abstract
The fabrication process of refractive microlens arrays with a continuous surface relief is described. The elements are fabricated with a laser beam lithographic system and are directly written into photoresist. By this method the manufacturing of lenses with a broad range of numerical apertures N.A. is possible. Lenses with different diameters in the range from 25 to 100micrometers were written in photoresist. Furthermore, a modified technique with two subsequent exposures is applied which simplifies the procedure for generating the data and writing the lens topography. First attempts to transfer the structures into the substrate by ion etching show positive results. A first suggested fabrication method of the spherical microlenses by an exposure technique using a z-stepped probe chuck is also discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Georges Przyrembel "Fabricating spherical microlens arrays with a two-step laser beam writing technique", Proc. SPIE 2152, Diffractive and Holographic Optics Technology, (17 June 1994); https://doi.org/10.1117/12.178087
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