Fabrication of high-performance GaAs/AlGaAs optical phase modulators for microwave/photonic integrated circuits

Stanley H. Kravitz; G. Allen Vawter; Vincent M. Hietala; Morris Burt Snipes Jr.; Marcelino G. Armendariz; Richard Franklin Carson; B. Eugene Hammons; Ronald E. Leibenguth

doi:10.1117/12.177393

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10 June 1994 Fabrication of high-performance GaAs/AlGaAs optical phase modulators for microwave/photonic integrated circuits

Stanley H. Kravitz, G. Allen Vawter, Vincent M. Hietala, Morris Burt Snipes Jr., Marcelino G. Armendariz, Richard Franklin Carson, B. Eugene Hammons, Ronald E. Leibenguth

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Proceedings Volume 2155, Optoelectronic Signal Processing for Phased-Array Antennas IV; (1994) https://doi.org/10.1117/12.177393
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

A high-speed distributed electrode phase modulator has been designed and fabricated. The processing of this device presented many challenges: (1) smooth rib waveguides etched to an accuracy of +/- 200angstroms; (2) polyimide planarization of 5micrometers step heights, with vias patterned as small as 1.6 micrometers ; (3) contact metalization with resistivities as low as 1 X 10^-6(Omega) -cm²; (4) coplanar n and p gold contacts 2.5 micrometers thick, with a 0.5 micrometers gap between contacts; (5) ion- implantation to achieve both electrical and optical isolation. A brief description of how each of these processes have been accomplished will be presented. The epitaxial growth structure of this device will be discussed, including SEM cross-sections of the completed device.

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Stanley H. Kravitz, G. Allen Vawter, Vincent M. Hietala, Morris Burt Snipes Jr., Marcelino G. Armendariz, Richard Franklin Carson, B. Eugene Hammons, and Ronald E. Leibenguth "Fabrication of high-performance GaAs/AlGaAs optical phase modulators for microwave/photonic integrated circuits", Proc. SPIE 2155, Optoelectronic Signal Processing for Phased-Array Antennas IV, (10 June 1994); https://doi.org/10.1117/12.177393

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