Multiport backside-illuminated CCD imagers for high-frame-rate camera applications

Peter A. Levine; Donald J. Sauer; Fu-Lung Hseuh; Frank V. Shallcross; Gordon Charles Taylor; Grazyna M. Meray; John R. Tower; Lorna J. Harrison; William B. Lawler

doi:10.1117/12.172775

1 May 1994 Multiport backside-illuminated CCD imagers for high-frame-rate camera applications

Peter A. Levine, Donald J. Sauer, Fu-Lung Hseuh, Frank V. Shallcross, Gordon Charles Taylor, Grazyna M. Meray, John R. Tower, Lorna J. Harrison, William B. Lawler

Author Affiliations +

Proceedings Volume 2172, Charge-Coupled Devices and Solid State Optical Sensors IV; (1994) https://doi.org/10.1117/12.172775
Event: IS&T/SPIE 1994 International Symposium on Electronic Imaging: Science and Technology, 1994, San Jose, CA, United States

Abstract

Two multiport, second-generation CCD imager designs have been fabricated and successfully tested. They are a 16-port 512 X 512 array and a 32-port 1024 X 1024 array. Both designs are back illuminated, have on-chip CDS, lateral blooming control, and use a split vertical frame transfer architecture with full frame storage. The 512 X 512 device has been operated at rates over 800 frames per second. The 1024 X 1024 device has been operated at rates over 300 frames per second. The major changes incorporated in the second-generation design are, reduction in gate length in the output area to give improved high-clock-rate performance, modified on-chip CDS circuitry for reduced noise, and optimized implants to improve performance of blooming control at lower clock amplitude. This paper discusses the imager design improvements and presents measured performance results at high and moderate frame rates. The design and performance of three moderate frame rate cameras are discussed.

Citation Download Citation

Peter A. Levine, Donald J. Sauer, Fu-Lung Hseuh, Frank V. Shallcross, Gordon Charles Taylor, Grazyna M. Meray, John R. Tower, Lorna J. Harrison, and William B. Lawler "Multiport backside-illuminated CCD imagers for high-frame-rate camera applications", Proc. SPIE 2172, Charge-Coupled Devices and Solid State Optical Sensors IV, (1 May 1994); https://doi.org/10.1117/12.172775

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