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1 April 1994 Very large precision mask manufacturing: an innovative approach
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Proceedings Volume 2174, Advanced Flat Panel Display Technologies; (1994) https://doi.org/10.1117/12.172150
Event: IS&T/SPIE 1994 International Symposium on Electronic Imaging: Science and Technology, 1994, San Jose, CA, United States
Abstract
State-of-the-Art Very Large Precision Masks (VLPMs) manufacture is presented in this paper, including the inspection and repair of these Cr/glass VLPMs. The plates were manufactured by using custom designed and constructed Large Area Stepper and Large Area Inspection and Repair System. VLPMs with stepping precision of 0.25 micrometers and critical dimension as small as 2 micrometers in an effective area of 508 mm X 508 mm have been produced using the Large Area Stepper. The Inspection and Repair system measures CDs and defect density. The custom designed software allows the operator to mark the defect type and its position, therefore the Inspection and Repair system is able to automatically repair dark defects by evaporating the chrome with a YAG laser, and clear defects by using laser enhanced metal deposition. Using these custom systems, defect free VLPMs were manufactured. VLPMs are used in the production of Flat Panel Displays, circuit boards or any other large effective area lithographic application. Flat panel display production costs are reduced by substituting stepping lithography by contact or projection lithography using VLPMs.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Graciela R. Guel "Very large precision mask manufacturing: an innovative approach", Proc. SPIE 2174, Advanced Flat Panel Display Technologies, (1 April 1994); https://doi.org/10.1117/12.172150
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