Confocal imaging of thin films

Colin J. R. Sheppard; T. J. Connolly

doi:10.1117/12.172083

4 April 1994 Confocal imaging of thin films

Colin J. R. Sheppard, T. J. Connolly

Proceedings Volume 2184, Three-Dimensional Microscopy: Image Acquisition and Processing; (1994) https://doi.org/10.1117/12.172083
Event: IS&T/SPIE 1994 International Symposium on Electronic Imaging: Science and Technology, 1994, San Jose, CA, United States

Abstract

The confocal imaging of thin film structures is investigated. A theoretical treatment of imaging of stratified media with continuously varying refractive index is presented, and the inverse problem of reconstructing the refractive index profile from a confocal image discussed.

Citation Download Citation

Colin J. R. Sheppard and T. J. Connolly "Confocal imaging of thin films", Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); https://doi.org/10.1117/12.172083

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