Reconstruction of surface profiles using optical differentiation and confocal microscopy

Andrew W. Kulawiec; Duncan T. Moore

doi:10.1117/12.172084

4 April 1994 Reconstruction of surface profiles using optical differentiation and confocal microscopy

Andrew W. Kulawiec, Duncan T. Moore

Proceedings Volume 2184, Three-Dimensional Microscopy: Image Acquisition and Processing; (1994) https://doi.org/10.1117/12.172084
Event: IS&T/SPIE 1994 International Symposium on Electronic Imaging: Science and Technology, 1994, San Jose, CA, United States

Abstract

This paper presents a technique for producing accurate surface profile measurements using optical differentiation and confocal microscopy. An experimental system based on this technique has been constructed for the purpose of surface profiling. Experimental results are presented and compared to measurements from other systems. Theoretical transfer functions are also presented to characterize system performance.

Citation Download Citation

Andrew W. Kulawiec and Duncan T. Moore "Reconstruction of surface profiles using optical differentiation and confocal microscopy", Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); https://doi.org/10.1117/12.172084

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