Paper
1 May 1994 Multilayer tunable ferroelectric materials and thin films
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Abstract
This work outlines the material processing technique used to fabricate a multilayer ferroelectric material BST (barium strontium titanate). The composition and thickness of each layer can be controlled such that a tunable multilayer frequency-selective device can be fabricated. The BST materials can be processed by a combination of sol-gel powder processing, tape-casting and microwave processing to yield a multilayer composite material having variable and tunable dielectric properties. For thinner layers, microwave assisted plasma deposition is used to prepare thin film BST from a sol-gel slurry.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vijay K. Varadan, Vasundara V. Varadan, Fathi Selmi, Zoubeida Ounaies, and K. A. Jose "Multilayer tunable ferroelectric materials and thin films", Proc. SPIE 2189, Smart Structures and Materials 1994: Smart Materials, (1 May 1994); https://doi.org/10.1117/12.174080
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CITATIONS
Cited by 3 scholarly publications and 1 patent.
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KEYWORDS
Microwave radiation

Multilayers

Thin films

Ceramics

Dielectrics

Sol-gels

Plasma

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