Paper
6 May 1994 Smart piezo stacks as actuators for precision control of adaptive reflectors
Khanh A. Doung, Ephrahim Garcia, Henry B. Waites
Author Affiliations +
Abstract
The use of piezoceramics in micropositioning is increasing tremendously. Deformable and segmented optical reflectors are examples where the micropositioning is critical to system performance. In addition to correcting for mirror flaws and the effects of gravity, the actuators in adaptive segmented reflectors can constantly correct each of the segmented reflector surfaces to compensate for the disturbances in the atmosphere. This task requires the piezoceramic actuator, used to position the mirror, which operates over a large bandwidth with very high resolution. However, the hysteresis associated with piezoceramics hampers its application in optical micropositioning where nanometer resolution and wide bandwidth is required. Clearly, there is a need to compensate for these hysteretic effects to make piezoceramics more suitable for such high resolution applications. This paper presents an investigation of the linear performance of piezoceramic materials. The investigation is made to study the level of precision that can be attained for a broad- band amplification of an open loop micro-positioner. Direct compensation is introduced that can enhance the open loop dynamics of the actuator.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Khanh A. Doung, Ephrahim Garcia, and Henry B. Waites "Smart piezo stacks as actuators for precision control of adaptive reflectors", Proc. SPIE 2190, Smart Structures and Materials 1994: Smart Structures and Intelligent Systems, (6 May 1994); https://doi.org/10.1117/12.175206
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Actuators

Mirrors

Reflectors

Ferroelectric materials

Signal attenuation

Prototyping

Lead

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