Pulsed electron-beam source for high-resolution high-throughput microlithography

Tseng-Yang Hsu; Peyman Hadizad; Rong Lin Liou; Greg Roth; Martin A. Gundersen

doi:10.1117/12.175813

13 May 1994 Pulsed electron-beam source for high-resolution high-throughput microlithography

Tseng-Yang Hsu, Peyman Hadizad, Rong Lin Liou, Greg Roth, Martin A. Gundersen

Proceedings Volume 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV; (1994) https://doi.org/10.1117/12.175813
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

Research and development of a broad area (> 1 cm diameter), high brightness (approximately 10⁷ A/cm² rad²), high current density (> 50 A/cm²), pulsed electron beam source for high throughput, high resolution (< 0.25 micrometers ) lithography is reported. This novel electron beam source is simple, robust, will cost significantly less than direct write electron beam systems, and allows for high throughput pattern generation (> 30 2 - 3 inch wafers/hr). The electron beam is produced by the back-lighted thyratron (BLT) and is transported through a dielectric tube to achieve focusing and collimation. Replication of 10 $,mum line structures in PMMA using a nickel grid mask has been achieved. At present, masks comprised of diamond thin film (1 - 15 micrometers ) membranes on a silicon substrate are being fabricated to study the replication of submicrometer structures in PMMA. In this case, of primary importance are mask heating and deformation.

Citation Download Citation

Tseng-Yang Hsu, Peyman Hadizad, Rong Lin Liou, Greg Roth, and Martin A. Gundersen "Pulsed electron-beam source for high-resolution high-throughput microlithography", Proc. SPIE 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV, (13 May 1994); https://doi.org/10.1117/12.175813

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available