Vertical lithography: controlling resist profiles in optical lithography with a large area electron beam

William R. Livesay

doi:10.1117/12.175823

13 May 1994 Vertical lithography: controlling resist profiles in optical lithography with a large area electron beam

William R. Livesay

Proceedings Volume 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV; (1994) https://doi.org/10.1117/12.175823
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

An electron beam exposure method is described which provides a means of controlling the wall slope and edge profiles of developed patterns in photoresist. The method utilizes a large area, uniform (and near monoenergetic) electron beam exposure system with a programmable accelerating voltage and a precise electron beam dose monitor. Conventional optical lithography patterning is followed by a blanket electron beam exposure. Several variations of the process are described where the photoresist is exposed with the blanket electron beam before or after the development of the resist. The resist is exposed at selected doses of different accelerating voltages inducing a graded solubility at different depths in the resist layer. The process can be used advantageously for achieving undercut profiles in resist for lift- off patterning. Further refinements of the process can be used for micromachining applications and creating three dimensional molds for micromechanical structures.

Citation Download Citation

William R. Livesay "Vertical lithography: controlling resist profiles in optical lithography with a large area electron beam", Proc. SPIE 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV, (13 May 1994); https://doi.org/10.1117/12.175823

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available