Advantages of pulse counting in microchannel plate detectors

Steven R. Rogers

doi:10.1117/12.174158

1 May 1994 Advantages of pulse counting in microchannel plate detectors

Steven R. Rogers

Proceedings Volume 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII; (1994) https://doi.org/10.1117/12.174158
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

The output signal from a multichannel plate detector (MCP) can be processed by one of two methods: pulse counting or charge accumulation. For a two-stage MCP, the output signal-to- noise ratio is nearly twice as great for pulse counting. This represents a significant advantage in low count-rate applications, such as e-beam metrology of non-conducting specimens.

Citation Download Citation

Steven R. Rogers "Advantages of pulse counting in microchannel plate detectors", Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); https://doi.org/10.1117/12.174158

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available