Effect of shifter edge angle and lens aberration on the pattern profile in the edge-line phase-shift method

Mitsunori Nakatani; Hiroshi Matsuoka; Hirofumi Nakano; Kazuya Kamon; Kazuhiko Sato; Osamu Ishihara; Shigeru Mitsui

doi:10.1117/12.175410

17 May 1994 Effect of shifter edge angle and lens aberration on the pattern profile in the edge-line phase-shift method

Mitsunori Nakatani, Hiroshi Matsuoka, Hirofumi Nakano, Kazuya Kamon, Kazuhiko Sato, Osamu Ishihara, Shigeru Mitsui

Proceedings Volume 2197, Optical/Laser Microlithography VII; (1994) https://doi.org/10.1117/12.175410
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

Origin of asymmetrical resist patterns, which had been observed in the edge-line phase shift lithography, has been investigated by simulations and experiments concerning the affects of shifter edge angle and stepper lens aberration. It has been found that the asymmetry of resist patterns has been caused by coma aberration of stepper projection lens and enhanced as the shifter width becomes narrower. Furthermore, the effect of shifter edge angle has been proved equivalent to the effect of narrowing the shifter width.

Citation Download Citation

Mitsunori Nakatani, Hiroshi Matsuoka, Hirofumi Nakano, Kazuya Kamon, Kazuhiko Sato, Osamu Ishihara, and Shigeru Mitsui "Effect of shifter edge angle and lens aberration on the pattern profile in the edge-line phase-shift method", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); https://doi.org/10.1117/12.175410

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available