Optimization of modified illumination for 0.25-um resist patterning

Keiichiro Tounai; Shuichi Hashimoto; Seiichi Shiraki; Kunihiko Kasama

doi:10.1117/12.175436

17 May 1994 Optimization of modified illumination for 0.25-um resist patterning

Keiichiro Tounai, Shuichi Hashimoto, Seiichi Shiraki, Kunihiko Kasama

Proceedings Volume 2197, Optical/Laser Microlithography VII; (1994) https://doi.org/10.1117/12.175436
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

In order to achieve wide focus latitude in various 0.25 micrometers patterns, the optimization of optical parameters in KrF excimer laser lithography has been investigated by means of optical intensity simulation. The accuracy of simulated DOF values was confirmed experimentally, using a chemically amplified negative resist and a KrF excimer laser stepper with NA equals 0.5 and sigma equals 0.7. The optical parameters, such as NA, sigma, and annular shield ratio in an annular illumination, were optimized for 1:1 L&S. Our results indicate that the DOF value in the conventional illumination is insufficient even under the optimum condition, but that in the annular illumination it is wide enough. To investigate the DOF value for sparse patterns the minimum contrast value, as well as the optimum optical parameters, was estimated for each defocal position. The optimum parameters set for sparse patterns was very different from that for 1:1 L&S. Moreover, the DOF value of sparse pattern was relatively small compared to that of 1:1 L&S.

Citation Download Citation

Keiichiro Tounai, Shuichi Hashimoto, Seiichi Shiraki, and Kunihiko Kasama "Optimization of modified illumination for 0.25-um resist patterning", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); https://doi.org/10.1117/12.175436

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available