Optimizing distortion for a large-field submicrometer lens

Shiow-Hwei Hwang; Bruce J. Ruff

doi:10.1117/12.175480

17 May 1994 Optimizing distortion for a large-field submicrometer lens

Shiow-Hwei Hwang, Bruce J. Ruff

Proceedings Volume 2197, Optical/Laser Microlithography VII; (1994) https://doi.org/10.1117/12.175480
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

A large field i-line lens has been developed for submicron IC manufacturing. This lens has a field size of 22 mm X 44 mm (total area of 9.68 cm²), which is the largest field size of any current submicron microlithographic lens. A primary consideration in the development of this lens is its overall distortion, which must be small enough to provide total overlay consistent with submicron design rules. This paper presents distortion characteristics of the Ultratech Stepper Model 2244i lens. Models that can be used to predict the lens distortion and result in minimizing absolute distortion have been developed. The technique used to minimize the lens distortion of the 2244i, along with the effectiveness and the application, also is described. We review the utility of this process for matching new lenses to a customer's existing lenses, and we show how this process supports the mix-and-match of this lens's large field size with the smaller fields of reduction lenses.

Citation Download Citation

Shiow-Hwei Hwang and Bruce J. Ruff "Optimizing distortion for a large-field submicrometer lens", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); https://doi.org/10.1117/12.175480

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available