Flat, thinned scientific CCDs

Rusty Winzenread

doi:10.1117/12.176691

1 June 1994 Flat, thinned scientific CCDs

Rusty Winzenread

Proceedings Volume 2198, Instrumentation in Astronomy VIII; (1994) https://doi.org/10.1117/12.176691
Event: 1994 Symposium on Astronomical Telescopes and Instrumentation for the 21st Century, 1994, Kailua, Kona, HI, United States

Abstract

One shortcoming of large area, thinned scientific CCDs has been their lack of planarity. Areas of the silicon membrane that lie outside the depth of focus of the optical system lose resolution and cause a distorted image. Reticon has developed a thinning procedure that eliminates the ripples and bow often seen in thinned CCDs. This paper discusses the thinning procedure used to produce a flat, thinned, 2048 x 2048 pixel scientific CCD. The pixels are 13.5 micrometers square, making the image area of the CCD larger than 1' on a side. The final silicon membrane is between 16 and 18 micrometers thick and is flat to less than 5 micrometers peak-to- peak across the imaging area. Frontside devices have demonstrated a low dark current of 50 pa/cm² at 20 C and full well of 120k electrons when the CCD is run in MPP mode. The charge transfer efficiency exceeds 0.99999 and the readout noise is less than 2.5 electrons when the CCD is operated at 20 kHz.

Citation Download Citation

Rusty Winzenread "Flat, thinned scientific CCDs", Proc. SPIE 2198, Instrumentation in Astronomy VIII, (1 June 1994); https://doi.org/10.1117/12.176691

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available