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1 June 1994 Neutron transmutation doped natural and isotopically engineered germanium thermistors
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We report on the development, fabrication and performance of a new class of thermal sensors for far IR and millimeter wave detection. These devices consist of small single crystal samples of ultra-pure, natural or isotopically engineered germanium which have been doped by the neutron transmutation doping (NTD) technique. The concentrations of the acceptor and donor dopants (NA,ND) can be accurately controlled with this technique. They depend on the thermal neutron fluence, the neutron absorption cross sections and the atomic fractions of 70Ge (for the Ga acceptors) and 74Ge (for the As donors), respectively. The values of NA and ND and their ratio result in a predictable resistivity of the Ge crystals down to temperatures of a few milliKelvin. The excellent control of the resistivity down to very low temperatrues, together with the development of ohmic contacts working at the lowest temperatures, allows the fabrication of high sensitivity bolometer arrays with over 100 pixels and highly uniform response.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene E. Haller, K. M. Itoh, Jeffrey W. Beeman, William L. Hansen, and V. I. Ozhogin "Neutron transmutation doped natural and isotopically engineered germanium thermistors", Proc. SPIE 2198, Instrumentation in Astronomy VIII, (1 June 1994);

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