Advanced laser driver for soft x-ray projection lithography

Luis E. Zapata; Raymond J. Beach; C. Brent Dane; Patrick Reichert; John N. Honig; Lloyd A. Hackel

doi:10.1117/12.184615

16 August 1994 Advanced laser driver for soft x-ray projection lithography

Luis E. Zapata, Raymond J. Beach, C. Brent Dane, Patrick Reichert, John N. Honig, Lloyd A. Hackel

Proceedings Volume 2206, High-Power Gas and Solid State Lasers; (1994) https://doi.org/10.1117/12.184615
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria

Abstract

A diode-pumped Nd:YAG laser for use as a driver for a soft x-ray projection lithography system is described. The laser will output 0.5 to 1 J per pulse with about 5 ns pulse width at up to 1.5 kHz repetition frequency. The design employs microchannel-cooled diode laser arrays for optical pumping, zigzag slab energy storage, and a single frequency oscillator injected regenerative amplifier cavity using phase conjugator beam correction for near diffraction limited beam quality. The design and initial results of this laser's activation experiments are presented.

Citation Download Citation

Luis E. Zapata, Raymond J. Beach, C. Brent Dane, Patrick Reichert, John N. Honig, and Lloyd A. Hackel "Advanced laser driver for soft x-ray projection lithography", Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); https://doi.org/10.1117/12.184615

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