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28 July 1994 Grid polarizer for the visible spectral region
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Abstract
We report on the fabrication of a grid polarizer for the visible spectral region, based on metallic grids with periods below 100 nm. Theoretical calculations of the degree of polarization predict useful values for the visible region, if the period is in the range of 100 nm. The properties of the polarizer are shown to be strongly dependent on the optical constants of the metal and the substrate. For the fabrication of the grids, direct e-beam writing in combination with a dry etching process has been used. Metallic grids with 50 nm lines and a period of 100 nm were fabricated on a glass substrate. Measurements of the degree polarization were made at a wavelength of 670 nm. The results are compared to theoretical calculations made in the framework of a rigorous diffraction theory.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernd Stenkamp, Michael Abraham, Wolfgang Ehrfeld, Erwin Knapek, M. Hintermaier, Michael T. Gale, and Rudolph H. Morf "Grid polarizer for the visible spectral region", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180973
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