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28 July 1994 Replicated microstructures for integrated optics
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Abstract
Fabrication technology and device structures suitable for low- cost production of replicated integrated optical devices are presented and discussed. Shim fabrication and replication techniques such as hot embossing and injection moulding are capable of achieving the submicron resolution, high fidelity requirements of integrated optical structures. Polymeric materials have been shown to be suitable both as replicated substrates and as waveguiding films with losses under 1 dB/cm. High index dielectric waveguiding films are highly suited to sensor applications and have been fabricated with losses under 5 dB/cm. New types of vertically structured integrated optical devices which can be fabricated by replicating a microstructure followed by dielectric coating are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael T. Gale, Luca G. Baraldi, and Rino E. Kunz "Replicated microstructures for integrated optics", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180948
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