Design and fabrication of thin film monolithic uncooled infrared detector arrays

Kevin Charles Liddiard; Mark H. Unewisse; Olaf Reinhold

doi:10.1117/12.179725

15 July 1994 Design and fabrication of thin film monolithic uncooled infrared detector arrays

Kevin Charles Liddiard, Mark H. Unewisse, Olaf Reinhold

Proceedings Volume 2225, Infrared Detectors and Focal Plane Arrays III; (1994) https://doi.org/10.1117/12.179725
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

This paper discusses the design of monolithic thin film thermal detectors, with particular reference to the parameters which influence performance such as thermal conductance. Methods for implementing thermal isolation are described, and critical fabrication technology is outlined. Optional materials technology for thin film resistance bolometers is reviewed, and consideration is given to bias and signal conditioning techniques.

Citation Download Citation

Kevin Charles Liddiard, Mark H. Unewisse, and Olaf Reinhold "Design and fabrication of thin film monolithic uncooled infrared detector arrays", Proc. SPIE 2225, Infrared Detectors and Focal Plane Arrays III, (15 July 1994); https://doi.org/10.1117/12.179725

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