Sputtered film thermistor IR detectors

Shankar B. Baliga; Martin R. Rost; Alan P. Doctor

doi:10.1117/12.179726

15 July 1994 Sputtered film thermistor IR detectors

Shankar B. Baliga, Martin R. Rost, Alan P. Doctor

Proceedings Volume 2225, Infrared Detectors and Focal Plane Arrays III; (1994) https://doi.org/10.1117/12.179726
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

The thermistor infrared detector or bolometer is the detector of choice in many classical remote sensing applications such as horizon sensing, noncontact thermometry, and industrial applications. In recent years, the authors have developed a thin film process where the thermistor material is deposited from a target directly onto the substrate. This is an advance over the labor intensive ceramic technology, where sintered flakes of the thermistor are bonded to the substrate. The thin film technique permits a variety of device constructions and configurations. Detectors fabricated on heat-sunk ceramic substrates can withstand high operating temperatures and large incident optical power, in both pulsed and CW laser measurements. For dc or low frequency measurements, the films can be deposited onto a thermally isolated membrane with applications in motion sensing, gas detection, and temperature measurement. Utilizing advances in micromachining a 2D array of thermally isolated microbolometer sensors, integrated onto a silicon wafer containing readout circuitry may be achieved. This paper describes the construction of the sputtered film thermistor detectors, their operation, and applications.

Citation Download Citation

Shankar B. Baliga, Martin R. Rost, and Alan P. Doctor "Sputtered film thermistor IR detectors", Proc. SPIE 2225, Infrared Detectors and Focal Plane Arrays III, (15 July 1994); https://doi.org/10.1117/12.179726

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