Paper
21 March 1994 Development of emissivity models and induced transmission filters for multiwavelength imaging pyrometry
Nuggehalli M. Ravindra, Fei Ming Tong, Samiul Amin, J. Shah, Walter F. Kosonocky, Nathaniel J. McCaffrey, Constantine N. Manikopoulos, Bawa Singh, Ramazan Soydan, Lawrence K. White, Pete Zanzucchi, Dorothy Hoffman, James R. Markham, Shaohua Liu, Karen Kinsella, Richard T. Lareau, L. M. Casas, T. Monahan, D. W. Eckart
Author Affiliations +
Abstract
The results of our work on the development of emissivity models and IR filters for applications in multi-wavelength imaging pyrometry are presented. Techniques such as Fourier transform IR spectroscopy have been deployed to determine the emissivity of Si and SiO2/Si in the temperature range of 331 to 1235 K. These measurements have been obtained for n-Si, p-Si and SiO2/Si in the oxide thickness range of 60 to 500 nm. These results coupled with calculations of emissivity from first principles lead us to model the wavelength dependence of emissivity. Preliminary measurements of emissivity of HgCdTe are reported.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nuggehalli M. Ravindra, Fei Ming Tong, Samiul Amin, J. Shah, Walter F. Kosonocky, Nathaniel J. McCaffrey, Constantine N. Manikopoulos, Bawa Singh, Ramazan Soydan, Lawrence K. White, Pete Zanzucchi, Dorothy Hoffman, James R. Markham, Shaohua Liu, Karen Kinsella, Richard T. Lareau, L. M. Casas, T. Monahan, and D. W. Eckart "Development of emissivity models and induced transmission filters for multiwavelength imaging pyrometry", Proc. SPIE 2245, Thermosense XVI: An International Conference on Thermal Sensing and Imaging Diagnostic Applications, (21 March 1994); https://doi.org/10.1117/12.171183
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Cited by 7 scholarly publications.
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KEYWORDS
Silicon

Temperature metrology

Metals

Semiconducting wafers

Aluminum

Mercury cadmium telluride

Optical filters

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