Absolute distance and velocity measurements by a double integrated heterodyne interferometer

A. Chebbour; Christophe Gorecki; Gilbert M. Tribillon

doi:10.1117/12.194319

15 November 1994 Absolute distance and velocity measurements by a double integrated heterodyne interferometer

A. Chebbour, Christophe Gorecki, Gilbert M. Tribillon

Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994) https://doi.org/10.1117/12.194319
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany

Abstract

A double integrated interferometer is proposed for absolute distance and velocity measurements with directional discrimination. An injection current-modulated laser diode is used as the wavelength tunable light source. One of the interferometers is used as a reference for systematic calibration. The second one permits the test distance measuring. The calibration enables the compensation of instantaneous fluctuations of the frequency modulation, the output light power drift, the frequency deviation, the refractive index and other external environmental disturbance corrections. The system is used for distance measuring from a few millimeters to 500 mm with a resolution better than 10 micrometers .

Citation Download Citation

A. Chebbour, Christophe Gorecki, and Gilbert M. Tribillon "Absolute distance and velocity measurements by a double integrated heterodyne interferometer", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); https://doi.org/10.1117/12.194319

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