Computer-integrated manufacturing of advanced thin film coatings

Harry H. Bauer; Erwin Nuessler

doi:10.1117/12.192116

4 November 1994 Computer-integrated manufacturing of advanced thin film coatings

Harry H. Bauer, Erwin Nuessler

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192116
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

We have implemented a process control system, based on in-situ spectral photometry, for the manufacturing of advanced optical coatings. The coating process parameters as well as the theoretical design values, like refractive indices and thicknesses, are stored in a database for documentation. Based on the high accuracy of the spectral optical thickness control, several examples for advanced coatings with enhanced optical performances are given.

Citation Download Citation

Harry H. Bauer and Erwin Nuessler "Computer-integrated manufacturing of advanced thin film coatings", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192116

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available