Light scattering from localized and random interface or bulk irregularities in multilayer optics: the inverse problem

Claude Amra; Catherine Grezes-Besset; Sophie Maure; Didier Torricini

doi:10.1117/12.192060

4 November 1994 Light scattering from localized and random interface or bulk irregularities in multilayer optics: the inverse problem

Claude Amra, Catherine Grezes-Besset, Sophie Maure, Didier Torricini

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Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192060
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

The origin of light scattering is investigated for multilayers produced by Ion Assisted Deposition and Ion Plating. When the substrate roughness is greater than 0.5 nm, the angular levels clearly originate from a substrate effect, that is the replication of the substrate roughness throughout the multilayer. On the other hand, scattering from overcoated super-smooth silicon substrates may originate from surface roughness brought by materials or from bulk inhomogeneities. In order to separate surface and bulk effects, we measure the angular variation of the polarization ratio of the scattered waves. Measurements reveal unexpected results that lead us to calculate the influence of localized defects at interfaces and in the bulk. High-angle resolution measurements are performed to detect the presence of such discrete irregularities.

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Claude Amra, Catherine Grezes-Besset, Sophie Maure, and Didier Torricini "Light scattering from localized and random interface or bulk irregularities in multilayer optics: the inverse problem", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192060

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