Overlapping of roughness spectra measured in macroscopic (optical) and microscopic (AFM) bandwIDths

Claude Amra; Carole Deumie; Didier Torricini; Pierre J. Roche; Raymond Galindo; P. Dumas; F. Salvan

doi:10.1117/12.192140

4 November 1994 Overlapping of roughness spectra measured in macroscopic (optical) and microscopic (AFM) bandwIDths

Claude Amra, Carole Deumie, Didier Torricini, Pierre J. Roche, Raymond Galindo, P. Dumas, F. Salvan

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192140
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Light scattering and Atomic Force Microscopy (AFM) are used together to analyze surface roughness in a very wide frequency bandwidth, extending from macroscopic (optical) to microscopic (AFM) scales. The two techniques are shown to be in large agreement since the roughness spectra overlap at intersection of bandwidths. A particular behavior of roughness is emphasized that permits to predict scattering at very short wavelengths. Thin film materials obtained by different techniques (IAD, Ion Plating, EB) are also investigated via a comparison of roughness spectra measured before and after coating in all bandwidths.

Citation Download Citation

Claude Amra, Carole Deumie, Didier Torricini, Pierre J. Roche, Raymond Galindo, P. Dumas, and F. Salvan "Overlapping of roughness spectra measured in macroscopic (optical) and microscopic (AFM) bandwIDths", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192140

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