Data preparation for CORE system in a MEBES environment

Ming-Huei Lin

doi:10.1117/12.191954

3 November 1994 Data preparation for CORE system in a MEBES environment

Ming-Huei Lin

Author Affiliations +

Proceedings Volume 2254, Photomask and X-Ray Mask Technology; (1994) https://doi.org/10.1117/12.191954
Event: Photomask Japan '94, 1994, Kawasaki City, Kanagawa, Japan

Abstract

Early in 1993 a CORE-2564 was installed in Taiwan Mask Corporation (TMC). This was in addition to the two existing MEBES-III systems. We have developed a data preparation system which we call `PRE-CORE' to integrate the CORE system into our existing MEBES-based environment. This PRE-CORE system consists of a high speed workstation and CATS software, supplied by Transcription Enterprises Limited. The system links CORE-2564 and the original data processing computer through the Ethernet network. The data files are converted by the PRE-CORE system into a simpler format for CORE to handle. The time spent in data preparation in the CORE system is significantly reduced, and therefore more time is available for plate-writing. Furthermore, due to this simpler data format, CORE can write masks in precise address units faster than was previously possible, regardless of whether or not the patterns are scaled. This helps produce high quality reticles while at the same time enhancing turn around time. However, in the first stage the TMC lithographic process bias remains the same for both MEBES and CORE plates. In this paper, the PRE-CORE data treatment methodology will be described. The benefits of using PRE-CORE will be compared to results achieved without the pre-processing of PRE-CORE.

Citation Download Citation

Ming-Huei Lin "Data preparation for CORE system in a MEBES environment", Proc. SPIE 2254, Photomask and X-Ray Mask Technology, (3 November 1994); https://doi.org/10.1117/12.191954

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